JPS6416633U - - Google Patents
Info
- Publication number
- JPS6416633U JPS6416633U JP11253087U JP11253087U JPS6416633U JP S6416633 U JPS6416633 U JP S6416633U JP 11253087 U JP11253087 U JP 11253087U JP 11253087 U JP11253087 U JP 11253087U JP S6416633 U JPS6416633 U JP S6416633U
- Authority
- JP
- Japan
- Prior art keywords
- head
- thin film
- cvd
- substrate
- transport means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11253087U JPS6416633U (en]) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11253087U JPS6416633U (en]) | 1987-07-21 | 1987-07-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6416633U true JPS6416633U (en]) | 1989-01-27 |
Family
ID=31351551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11253087U Pending JPS6416633U (en]) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6416633U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03157928A (ja) * | 1989-11-15 | 1991-07-05 | Mitsubishi Electric Corp | 薄膜形成装置 |
-
1987
- 1987-07-21 JP JP11253087U patent/JPS6416633U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03157928A (ja) * | 1989-11-15 | 1991-07-05 | Mitsubishi Electric Corp | 薄膜形成装置 |
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